000 00379nam a2200157Ia 4500
003 STCL
008 181203s9999 xx 000 0 und d
020 _a9788181479858
040 _aSTCL
_bEN
_cSTCL
082 _222
245 0 _aHandbook of Vacuum Science and Technology
260 _bAcademic press
_aSan Diego
_c2005
300 _a835
546 _aEnglish
942 _2ddc
_cBK
999 _c86906
_d86906