000 00391nam a2200157Ia 4500
003 STCL
008 181203s9999 xx 000 0 und d
020 _a9781563962486
040 _aSTCL
_bEN
_cSTCL
082 _222
245 0 _aVacuum Science and Technology: Pioneers of the 20th Century
260 _bAIP Press
_aNew York
_c1994
300 _a229
546 _aEnglish
942 _2ddc
_cBK
999 _c86909
_d86909