| 000 | 00453nam a2200205Ia 4500 | ||
|---|---|---|---|
| 003 | STCL | ||
| 008 | 230729s9999 xx 000 0 und d | ||
| 020 | _a9788131764756 | ||
| 040 |
_aSTCL _cSTCL _bEN |
||
| 082 | _222 | ||
| 100 | _aLiu, Chang | ||
| 245 | 0 | _aFoundations of MEMS | |
| 246 | _aFoundations of mems | ||
| 250 | _a2 | ||
| 260 |
_bPearson _aNoida _c2012 |
||
| 300 | _a576 p | ||
| 365 | _b499 | ||
| 546 | _aEnglish | ||
| 942 |
_2DDC _e22 _cBK |
||
| 999 |
_c90297 _d90297 |
||