00334nam a2200145Ia 45000030006000000080041000060400015000471000015000622450032000772500006001092600038001153000006001535460012001590050017001710STCL150530s9999    xx            000 0 und d  aSTCLcSTCL  aGandhi S K  aVLSI Fabrication Principles  a2  bJohn Wiley & Sons; New Yorkc2004  a0  aEnglish20220125170524.0