00537nam a2200181Ia 4500003000500000008004100005020001800046040001900064082000700083100001900090245004400109260004000153300000800193546001200201942001200213999001700225952011300242STCL181203s9999    xx            000 0 und d  a9780471330011  aSTCLbENcSTCL  222  aMahan, John E. 0aPhysical Vapor Deposition of Thin Films  bJohn Wiley and SonsaNew Yorkc2000  a312  aEnglish  2ddccBK  c87294d87294  00102ddc4070aSTCALbSTCALcGENd2018-12-03l0o671.735 MAH-Pp95929r2018-12-03 00:00:00w2018-12-03yBK