00315nam a2200133Ia 45000030006000000080041000060400015000471000017000622450054000792500010001332600009001435460012001520050017001640STCL150530s9999    xx            000 0 und d  aSTCLcSTCL  aTolansky, S.  aMultiple beam interferometry of surface and films  aFirst  c1970  aEnglish20220125170147.0