00342nam a2200145Ia 45000030006000000080041000060400015000471000014000622450049000762500006001252600030001313000006001615460012001670050017001790STCL150530s9999    xx            000 0 und d  aSTCLcSTCL  aSze, S.M.  aSemiconductor devices physics and technology  a2  bJohn Wiley and Sonsc2009  a0  aEnglish20220125170214.0