00285nam a2200133Ia 45000030006000000080041000060400015000471000015000622450026000772500010001032600009001135460012001220050017001340STCL150530s9999    xx            000 0 und d  aSTCLcSTCL  aGray Peter  aBasic microtechniques  aFirst  c1953  aEnglish20220125170424.0