00306nam a2200121Ia 45000030006000000080041000060400015000471000014000622450049000762600030001255460012001550050017001670STCL150530s9999    xx            000 0 und d  aSTCLcSTCL  aSze, S.M.  aSemiconductor devices physics and technology  bJohn Wiley and Sonsc2003  aEnglish20220125170526.0