00326nam a2200133Ia 4500003000500000008004100005020001800046040001900064082000700083245004600090260003600136300000800172546001200180STCL181203s9999    xx            000 0 und d  a9788181479858  aSTCLbENcSTCL  222 0aHandbook of Vacuum Science and Technology  bAcademic pressaSan Diegoc2005  a835  aEnglish