00338nam a2200133Ia 4500003000500000008004100005020001800046040001900064082000700083245006400090260003000154300000800184546001200192STCL181203s9999    xx            000 0 und d  a9781563962486  aSTCLbENcSTCL  222 0aVacuum Science and Technology: Pioneers of the 20th Century  bAIP PressaNew Yorkc1994  a229  aEnglish