00310nam a2200133Ia 4500003000500000008004100005020001800046040001900064082000700083245003700090260002900127300000800156546001200164STCL181203s9999    xx            000 0 und d  a9783642054297  aSTCLbENcSTCL  222 0aHandbook of Thin-Film Technology  bSpringeraNew Yorkc2015  a379  aEnglish