00610nam a2200205Ia 4500003000500000008004100005020001800046040001900064082000700083100002500090245006300115250000600178260003900184300001500223365000900238546001200247942001600259999001700275952011200292STCL221019s9999    xx            000 0 und d  a9780195136050  aSTCLcSTCLbEN  222  aCampbell, Stephen A. 4aThe science and engineering of microelectronic fabrication  a2  bOxford UniversityaNew Delhic2004  axiv, 603 p  b2230  aEnglish  cBK2DDCe22  c87535d87535  00102DDC4070aSTCALbSTCALcGENd2022-10-19l0o621.38 CAM-Sp96138r2022-10-19 00:00:00w2022-10-19yBK