| 000 | 00379nam a2200157Ia 4500 | ||
|---|---|---|---|
| 003 | STCL | ||
| 008 | 181203s9999 xx 000 0 und d | ||
| 020 | _a9788181479858 | ||
| 040 |
_aSTCL _bEN _cSTCL |
||
| 082 | _222 | ||
| 245 | 0 | _aHandbook of Vacuum Science and Technology | |
| 260 |
_bAcademic press _aSan Diego _c2005 |
||
| 300 | _a835 | ||
| 546 | _aEnglish | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c86906 _d86906 |
||