| 000 | 00412nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | STCL | ||
| 008 | 181203s9999 xx 000 0 und d | ||
| 020 | _a9780471330011 | ||
| 040 |
_aSTCL _bEN _cSTCL |
||
| 082 | _222 | ||
| 100 | _aMahan, John E. | ||
| 245 | 0 | _aPhysical Vapor Deposition of Thin Films | |
| 260 |
_bJohn Wiley and Sons _aNew York _c2000 |
||
| 300 | _a312 | ||
| 546 | _aEnglish | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c87294 _d87294 |
||