| 000 | 00486nam a2200193Ia 4500 | ||
|---|---|---|---|
| 003 | STCL | ||
| 008 | 221019s9999 xx 000 0 und d | ||
| 020 | _a9780195136050 | ||
| 040 |
_aSTCL _cSTCL _bEN |
||
| 082 | _222 | ||
| 100 | _aCampbell, Stephen A. | ||
| 245 | 4 | _aThe science and engineering of microelectronic fabrication | |
| 250 | _a2 | ||
| 260 |
_bOxford University _aNew Delhi _c2004 |
||
| 300 | _axiv, 603 p | ||
| 365 | _b2230 | ||
| 546 | _aEnglish | ||
| 942 |
_cBK _2DDC _e22 |
||
| 999 |
_c87535 _d87535 |
||